XUV/Soft X-ray Multilayer Mirrors

XUV (Extreme Ultraviolet)/Soft X-ray multilayer mirrors specifically adapted to the experimental parameters and needs are key components for e.g. attosecond pulse generation and shaping based on the High-Harmonic Generation (HHG) process, Free Electron Lasers (FELs) or other ambitious (quantum) optical setups. Our design know-how and application experience gained through a strong collaboration with numerous scientists within these fields allows us to provide custom support for the planning of your setup and the realization of advanced unique experiments. Advanced simulation and optimization of the amplitude and phase characteristics of the multilayer mirrors precedes the coating process and atomic precision ion beam deposition provides the required high accuracy for (atomically) thin coating layers. The realization of multilayer optics for steering, spectral filtering and dispersion control of (sub-)femtosecond XUV/soft X-ray pulses are based on broadband (a-)periodic multilayer systems of binary or ternary stacks of nanolayers, with atomically smooth interfaces, of various materials, with layer thicknesses ranging from 1 to 10 nm and layer numbers ranging from ~10 up to ~1000 (Please see reference [1] and [2] for more details).

Key Product Features:

  • Large wavelength coverage
    • VUV/XUV: 18 eV-120 eV (68.9 nm-10.3 nm)
    • Soft X-ray: 120 eV-400 eV (10.3 nm-3.1 nm)
  • Customized center energy
  • Customized bandwidth (corresponds to pulse duration support)
  • Aperiodic/Chirped design possible (tailor-made specifications)
  • Most flat and spherical focusing substrates available on stock
  • Special substrate shapes (e.g. double mirror, rectangle) possible upon request
  • Tailored design for your experimental needs

Sample Measurement:


Measurement example and our Double Mirror. a) Simulation and XUV reflectivity measurement, together with the simulated phase evolution, for the XUV93eVBW5eV mirror design, supporting ~360 as pulses. b) Image of a coated XUV double mirror with a core diameter of 5 mm for e.g. IR/XUV time delay experiments being used for attosecond streaking (please see Application Note and our Delay Unit device K2).


  1. M. Hofstetter et al., “Attosecond dispersion control by extreme ultraviolet multilayer mirrors,” Optics Express 19(3), 1767-1776 (2011).
  2. A. Guggenmos et al., “Aperiodic CrSc multilayer mirrors for attosecond water window pulses,” Optics Express 21(19), 21728-21740 (2013).

Further information on XUV multilayer optics can be found in UFI’s design database.

Please contact us for further information and references.