Magnetron sputtering system

Helios, manufactured by Leybold Optics, is equipped with two magnetrons and a plasma source, thus providing plasma/ion-assisted reactive dual magnetron sputtering. The produced coating films have very dense layers which results in the following advantages:

  • extremely shift-free layers
  • mechanically and thermally stable layers
  • low scattering losses
  • high damage threshold

The system covers the spectral range 200-4500 nm and can coat substrate diameters of up to 100 mm.